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Schematic representation of the rapid thermal annealing (RTA) nitriding process. The process consists of successive infrared lamp emission cycles, each comprising a high-power heating stage (30 s) followed by a low-power cooling stage (5 s).

Journal: ACS Omega

Article Title: Influence of the Rapid Thermal Nitriding Process on the Properties of TiN Thin Films Obtained from TiO 2 Sol–Gel Layers

doi: 10.1021/acsomega.5c11587

Figure Lengend Snippet: Schematic representation of the rapid thermal annealing (RTA) nitriding process. The process consists of successive infrared lamp emission cycles, each comprising a high-power heating stage (30 s) followed by a low-power cooling stage (5 s).

Article Snippet: Nitridation occurs at high temperatures in a halogen infrared lamp-heated rapid thermal annealing (RTA) furnace (RTA As-One 100 from Annealsys).

Techniques: